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Book description:

Edition description:
2nd ed. of "Principles of plasma discharges and materials processing".
Publisher: Includes bibliographical references (p. 735-748) and index..
Date: 2005.
Place: Hoboken, N.J
Edition description:
Includes bibliographical references (p. 735-748) and index.
Identifiers:
ISBN 10: 0471720011

Number of pages: 757
Language: English

Principles of plasma discharges and materials processing

This book describes the following items:

Plasma Dynamics., Thin Films > Surfaces., Plasma Etching., Plasma Chemistry > Industrial Applications.,


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